金属/SiOx 界面におけるシリサイド形成

金属/シリコン酸化物界面におけるシリサイド形成†

REFERENCES

1. J. -G. Lee, T. Nagase, H. Yasuda, H. Mori, Journal of Applied Physics, 117, 194307 1-8 (2015)., "Synthesis of metal silicide at metal/silicon oxide interface by electronic excitation", https://dx.doi.org/10.1063/1.4921429
2. T. Nagase, R. Yamashita, J.-G. Lee, Microscopy, 64, i26 (2015)., "In situ observation of Pt silicide formation at Pt/SiOx interface under electron irradiation", https://dx.doi.org/10.1093/jmicro/dfv102
3. T. Nagase, R. Yamashita, J.-G. Lee, Microscopy 65 S1, i32 (2016)., "Electron-Irradiation-Induced Structural Changes at Pt/SiOx Interfaces at 773K", https://dx.doi.org/10.1093/jmicro/dfw064
4. T. Nagase, R. Yamashita, J.-G. Lee, AIP Advances, 8, 055110 1-5 (2018)., "In situ atomic-level observation of the formation of platinum silicide at platinum-silicon oxide interfaces under electron irradiation", https://doi.org/10.1063/1.5031450